PhaseView's optical instruments can measure widths of razor blades, typically in the range between 0.5 - 1.0 μm at 2 μm and between 15 - 20 μm at 2 μm and 50 μm distance, respectively, from the ultimate edge, to within a height resolution of 5.6 nm, and with high repeatability, and high throughput (typically, 1 razor blade per second) limited only by the sample stage speed.

Also, the instruments allow to discriminate between surface roughness of the areas of the blades at different distances (0 - 60 μm) from the ultimate edge to within a nanometer resolution.