MicroPhase® Typical Applications

MicroPhase turns any microscope in a 3D metrology device. MicroPhase as a video CCD camera fits on any microscope with its standard c-mount with no needs of additional optics or accessories.


MicroPhase is a flexible instrument, adding 3D visualization and measurement capabilities without alteration of microscope observation modes.


Automatic acquisition and processing are performed by GetPhase providing easy operation, fast and accurate results.


MicroPhase®
3D device for optical microscopes

Easy-to-use - Fast - Cost-effective


Measurement Capabilities
  • 3D Surface topography
  • Profile extraction
  • Roughness & Waviness
  • Step height
Metrology Instrument
  • All measurements made according ISO standards
  • Roughness
  • Step Height
Parameters
  • Axial Z range up to 1mm
  • Repeatability 10 nm
  • Area up to 100 x 100 mm