SurPhase® Typical Applications

SurPhase is a stand-alone 3D video microscope integrating a high resolution CCD camera, a controlled Led illumination and an objective turret with 6 positions for sample analysis in reflection.


SurPhase is an ideal tool for 3D surface characterization, combining 2D video microscopy and 3D measurement capabilities in nanometric resolution range according ISO standards.


Automatic acquisition and processing are performed by GetPhase providing easy operation, fast and accurate results.


SurPhase®
3D stand-alone Metrology instrument

Easy-to-use - Fast - Cost-effective


Measurement Capabilities
  • 3D Surface topography
  • Profile extraction
  • Roughness & Waviness
  • Step height
Metrology Instrument
  • All measurements made according ISO standards
  • Roughness
  • Step Height
Parameters
  • Axial Z range up to 1mm
  • Repeatability 10 nm
  • Area up to 100 x 100 mm