SurPhase HS® Typical Applications

The new SurPhase HS® sensor from PhaseView allows very fast 3D measurement for the shop floor or in line production.


Roughness with Ra below 1nm or profiles up to 400 µm height can be measured in less than 1 second for 1M measurement points, with high accuracy and repeatability.


This new 3D optical instrument comes in a smart light weight packaging, and is totally insensitive to vibrations for use in any industrial environment. PhaseView offers both turnkey and OEM version to ease integration in automated inspections systems.


SurPhase HS®
High speed 3D measurement Instrument

Easy-to-use - Fast - Cost-effective


Key Advantages
  • Fast measurement speed and high repeatability
  • Measurements from nanometer to millimeter range
  • Flexible system for free sample space and manipulation
  • Insensitive to vibration
  • Cost-effective
Measurement Capabilities
  • 3D Surface topography
  • Profile extraction
  • Roughness & Waviness
  • Step height
Parameters
  • Axial Z range 500μm
  • Repeatability 10 nm
  • Measurement speed 2.5sec